Series: The Springer International Series in Engineering and Computer Science (Book 293)
Paperback: 393 pages
Publisher: Springer; Softcover reprint of the original 1st ed. 1995 edition (February 23, 2014)
Language: English
ISBN-10: 9781461359524
ISBN-13: 978-1461359524
ASIN: 146135952X
Product Dimensions: 6.1 x 0.9 x 9.2 inches
Amazon Rank: 12733760
Format: PDF Text djvu ebook
Ion implantation offers one of the best examples of a topic that starting from the basic research level has reached the high technology level within the framework of microelectronics. As the major or the unique procedure to selectively dope semiconductor materials for device fabrication, ion implantation takes advantage of the tremendous development of microelectronics and it evolves in a multidisciplinary frame. Physicists, chemists, materials s...
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